X-ray Photoelectron Spectroscopy Axis Supra (KRATOS-XPS)


Guarantor:
Josef Polčák, Ph.D.

Instrument status:
Some Issues Some Issues, 9.5.2024 11:07, Max X-ray emission 10 mA, Fluorine on standard samples

Equipment placement:
CEITEC Nano - C1.38


AXIS SupraTM is an X-ray photoelectron spectrometer (XPS) with unrivalled automation and ease of use for materials surface characterisation. The patented AXIS technology ensures high electron collection efficiency in spectroscopy mode and low aberrations at high magnifications in parallel imaging mode.


Publications:

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Photogallery

Specification

Load lock chamber (Flexi-lock)

  

- 3 slots for sample holders
- automated transfer from/to sample analysis chamber
- sample heating/cooling from –100°C to 800°C
- a glovebox could be connected to the flexi-lock for sample handling in inert atmosphere

Sample analysis chamber

• 5 axis precision software-controlled manipulator, accuracy 2µm (X, Y, Z-axis)
• sample maximum size: diameter 32 mm, thickness 7 mm
• sample heating/cooling from –100°C to 800°C
• magnetic lenses ensure efficient collection of photoelectrons
• lateral resolution 15 µm for spectroscopy, 1 µm for parallel imaging
• detection limits 0.1 to 1 atomic %
• depth resolution: 2 to 8 nm
• energy resolution (FWHM) for Ag 3d5/2 peak < 0.48 eV
• X-ray monochromated source (combined Al/Ag anode, energies 1486.6/2984.3 eV)
• charge neutralization using low energy electrons for analysis of insulating samples
• gas cluster ion source produces monoatomic/cluster Ar+ ions for sample cleaning/depth profiling (sputtering speed up to 0.5 nm/second)

Surface science station

• samples mounted on 15 mm sample stubs
• sample heating/cooling from –100°C to 600°C
• three DN40CF flanges for effusion cells
• high-temperature gas reaction cell, heating up to 1000°C (1 bar)

Documents

Kratos Quick guide

Link to official instrument manuals (access for CEITEC Nano users only after login):

official instrument manuals - KRATOS-XPS

For more documentation created by CEITEC Nano see the "Document Library" section.


Documents